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Department of Materials and Environmental Chemistry, Stockholm University, Svante Arrhenius väg 16 C, 106 91 Stockholm, Sweden ...
College of Chemistry and Materials Science, Fujian Provincial Key Laboratory of Polymer Materials, Fujian Normal University, 32 Shangsan Road, Fuzhou 350007, China College of Chemistry and Materials ...
Abstract: The feasibility of using selective thermal cobalt metal (Co) atomic layer deposition (ALD) as high density Cu-Cu interconnect bonding is demonstrated at a low temperature (200 °C) and with ...
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