The launch of STAr Virgo Prima, which is one of probe card series for semiconductor parametric and reliability test, presents the achievement in 3D ... MEMS) probe card with the optimized ...

MEMS (Micro-Electro-Mechanical Systems, MEMS) probe card with the optimized structure and is an ideal to support fine-pitch and high-pin count test requirements. The Virgo Prima MEMS micro-cantilever ...

The launch of STAr Virgo Prima, which is one of probe card series for semiconductor parametric and reliability test, presents the achievement in 3D ... WAT test MEMS (Micro-Electro-Mechanical Systems, ...