In addition, the RedySmart™ thermal mass flow meters ... Using MEMS methods, both mechanical devices and electronic circuits can be produced on a silicon chip, just like the process employed ...

The revolution in MEMS has resulted directly from semiconductor fab technologies, facilitating precision mass production at ...

The result is a technology which can be mass-produced in extremely high volumes ... it's the first semiconductor technology application to produce MEMS microphone chips using a CMOS process flow," ...

The RedySmart™ thermal mass flow meters and controllers are micro-electro-mechanical system (MEMS)-based technology developed to ... mechanical devices and electronic circuits on a silicon chip, ...