The revolution in MEMS has resulted directly from semiconductor fab technologies, facilitating precision mass production at ...

That’s another unique thing about MEMS and sensor testing.” The process is similar to binning and trimming in semiconductor testing. Evolution of MEMS test Rob O’Reilly, senior member of the technical ...

MEMS are mechanical sensors and actuators that are fabricated using micromachining batch technologies similar to those used for integrated circuits. This translates into highly scalable production ...